JPH0744993Y2 - 圧力センサ - Google Patents

圧力センサ

Info

Publication number
JPH0744993Y2
JPH0744993Y2 JP1989065133U JP6513389U JPH0744993Y2 JP H0744993 Y2 JPH0744993 Y2 JP H0744993Y2 JP 1989065133 U JP1989065133 U JP 1989065133U JP 6513389 U JP6513389 U JP 6513389U JP H0744993 Y2 JPH0744993 Y2 JP H0744993Y2
Authority
JP
Japan
Prior art keywords
pressure
pressure chamber
cases
terminal
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1989065133U
Other languages
English (en)
Japanese (ja)
Other versions
JPH034243U (en]
Inventor
克明 安井
靖夫 多田
晃 ▲高▼島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1989065133U priority Critical patent/JPH0744993Y2/ja
Priority to KR2019900007438U priority patent/KR930007903Y1/ko
Priority to US07/531,428 priority patent/US4984466A/en
Publication of JPH034243U publication Critical patent/JPH034243U/ja
Application granted granted Critical
Publication of JPH0744993Y2 publication Critical patent/JPH0744993Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49103—Strain gauge making

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
JP1989065133U 1989-06-02 1989-06-02 圧力センサ Expired - Fee Related JPH0744993Y2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP1989065133U JPH0744993Y2 (ja) 1989-06-02 1989-06-02 圧力センサ
KR2019900007438U KR930007903Y1 (ko) 1989-06-02 1990-05-30 압력 감지기
US07/531,428 US4984466A (en) 1989-06-02 1990-05-31 Semiconductor pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989065133U JPH0744993Y2 (ja) 1989-06-02 1989-06-02 圧力センサ

Publications (2)

Publication Number Publication Date
JPH034243U JPH034243U (en]) 1991-01-17
JPH0744993Y2 true JPH0744993Y2 (ja) 1995-10-11

Family

ID=13278072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989065133U Expired - Fee Related JPH0744993Y2 (ja) 1989-06-02 1989-06-02 圧力センサ

Country Status (3)

Country Link
US (1) US4984466A (en])
JP (1) JPH0744993Y2 (en])
KR (1) KR930007903Y1 (en])

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5225373A (en) * 1990-03-07 1993-07-06 Mitsubishi Denki Kabushiki Kaisha Method of manufacturing semiconductor pressure sensor device with two semiconductor pressure sensor chips
AU5417096A (en) 1995-02-24 1996-09-11 Lucas Novasensor Pressure sensor with transducer mounted on a metal base
US5969259A (en) * 1995-04-07 1999-10-19 Sensym, Inc. Side port package for micromachined fluid sensor
US6601452B2 (en) * 2000-06-05 2003-08-05 Denso Corporation Semiconductor pressure sensor having rounded corner portion of diaphragm
JP2009098062A (ja) * 2007-10-18 2009-05-07 Denso Corp 圧力センサ
JP5853171B2 (ja) * 2010-12-13 2016-02-09 パナソニックＩｐマネジメント株式会社 半導体圧力センサおよびその製造方法
KR101740014B1 (ko) * 2015-06-15 2017-05-26 주식회사 아이티엠반도체 압력센서장치 및 그 제조방법
CN106197824A (zh) * 2016-08-26 2016-12-07 华景传感科技（无锡）有限公司 压力传感器及所适用的汽车
EP3534131B1 (de) * 2018-03-02 2021-06-02 Grundfos Holding A/S Drucksensor

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4600912A (en) * 1985-01-25 1986-07-15 Bourns Instruments, Inc. Diaphragm pressure sensor with improved tensile loading characteristics
US4790192A (en) * 1987-09-24 1988-12-13 Rosemount Inc. Silicon side by side coplanar pressure sensors
KR920005348Y1 (ko) * 1988-03-01 1992-08-03 미쓰비시전기주식회사 압력센서

Also Published As

Publication number Publication date
KR930007903Y1 (ko) 1993-11-24
JPH034243U (en]) 1991-01-17
US4984466A (en) 1991-01-15
KR910001185U (ko) 1991-01-24

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees